Grid generator for Electron Beam Lithography to cause chain scission or cross-linking of MMA / PMMA (Polymethylmethacrylate) depending on the gradation curve of the e-beam resist and electron dose absorbed by the e-beam resist to mask the substrate for corrosive etching.

X Start:

Y Start:

X Elements:

Y Elements:

X Length:

Y Length:

X Offset:

Y Offset:

Generate Grid

generate .wav from .xml layer

n-wellvisible

p-wellvisible

n-diffusevisible

p-diffusevisible

viavisible

polysiliconvisible

metal-1visible

metal-2visible

metal-3visible

metal-4visible

metal-5visible


monochrome/colour positive/negative resist Grid on/off

rectangles